The STUDIA UNIVERSITATIS BABEŞ-BOLYAI issue article summary

The summary of the selected article appears at the bottom of the page. In order to get back to the contents of the issue this article belongs to you have to access the link from the title. In order to see all the articles of the archive which have as author/co-author one of the authors mentioned below, you have to access the link from the author's name.

 
       
         
    STUDIA PHYSICA - Issue no. 1-2 / 2018  
         
  Article:   OPTIMIZATION OF TITANIUM NITRIDE FILM SYNTHESIS: CORRELATIONS BETWEEN THE STRUCTURE / MICRO-HARDNESS AND DEPOSITION CONDITIONS.

Authors:  MARIANA POP, G. NEGREA, A. POP.
 
       
         
  Abstract:  
DOI: 10.24193/subbphys.2018.07

Published Online: 2018-12-20
Published Print: 2018-12-20
pp. 75-88

VIEW PDF

FULL PDF

The DC sputtering method based on the variation of the potential of target function of nitrogen flow rate, for the deposition of titanium nitride (TiN) films, with the elementary chemical composition close to the stoichiometric one is presented. The process control method used in these experiments is the identification of the nitrogen flow required for the deposition of stoichiometric TiN layers by using the target potential as the reference parameter. The effects of the nitrogen flow, polarization voltage and discharge current on the structure, microstructure and micro-hardness of TiN films was studied.

Keywords: TiN films, DC sputtering, XRD, hardness.
 
         
     
         
         
      Back to previous page