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    STUDIA PHYSICA - Issue no. 1 / 2003  
         
  Article:   FOURIER ANALYSIS OF THE OSCILLATIONS OF A CCP GENERATOR.

Authors:  S.D. ANGHEL, ALPAR SIMON, L. HOBAJ.
 
       
         
  Abstract:  Fourier transform method is used in order to analyze the influence of the capacitively coupled plasma maintained in air at atmospheric pressure on the signal coming from the RF generator used to ignite and maintain the discharge. The plasma is ignited in the resonant circuit of the RF oscillator. The presence of the plasma in that circuit modifies the spectral composition of the RF signal in function of the absorbed power into the plasma.  
         
     
         
         
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