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Multi wall carbon nanotubes have been synthesized by DC-Plasma Enhanced Chemical Vapor Deposition with different plasma species. N₂ and Ar were added individually to the mixture of C₂H₂/H₂ plasma in the growth step of CNTs synthesis. The effect of plasma on pretreatment of catalyst film was studied as well as its effects on the CNTs diameter, structural quality and growth density, as given by Raman spectroscopy and Scanning Electron Microscopy. Special feature of this work is the use of gold as catalyst over Ni substrate. The results indicate that using N₂/C₂H₂/H₂ plasma, the diameter size of the CNTs in comparison with C₂H₂/H₂ plasma was increased whereas structural quality of these samples is quite the same. Conversely, using Ar/C₂H₂/H₂ plasma, a considerable decrease in the diameter size and quality of the CNTs was observed.

Keywords: Plasma CVD, nanotubes, Hydrogen etching, Gold catalyst.